Taiwan’s nanotechnology research and development heavyweight pusher Micro Nano Technology Research Center

In the national top eight micronano center appraisal subsidized by the Ministry of Science and Technology, the National University of Successary MicroNike Science and Technology Research Center is the largest, most influential, service and research performance in the country, serving 15,000 people a year. National teachers and students, more than 50 manufacturers, more than 100 industrial inspection reports, and the country's first "graphene and twodimensional material component center." The center has accumulated a wealth of talent cultivation experience and cuttingedge research results, and has become a research center of Taiwan Nanotechnology. In recent years, it has been actively introducing highend equipment to support the research and development of the center for many years to strengthen highvalue industry and education, not only to assist professional semiconductors and Optoelectronics manufacturers have developed mass production technology. This year, they have attracted more major Japanese companies to develop and supply raw materials for Taiwanese semiconductor manufacturers. In addition, through the creation of the Ministry of Science and Technology, the company has established a technology extension company with cuttingedge technology developed by the center.

With the rapid development of semiconductor technology, Moore's Law will be severely challenged to change the design of the transistor, from the traditional 2D planar design to the 3D structure, continuing the development of semiconductor technology. In order to break through the threenano process limit of the integrated circuit miniaturization, the transistor material with excellent physical properties and can be reduced to the atomic scale is the focus of development. The center has developed a twostage synthetic technology to grow highquality largearea layered twodimensional materials such as molybdenum disulfide (MoS2) and tungsten disulfide (WS2). It also integrates with the center's optical lithography, electron beam lithography, dry and wet etching process and atomic layer deposition system (the only ozonecontaining system in the country) to develop an advanced process platform for nanoscale components.

The center's nanomaterial analysis technology team provides professional electron microscopy analysis and has a new dual beam focused ion beam device for ion beam image analysis and 3D image construction analysis. In addition, the newly developed liquid electron microscope detection technology breaks through the limitations of traditional electron microscopy and directly tests liquid, colloidal, wet or hydrated samples in an electron microscope, and establishes a new company (liquid mirror technology) for liquid electronic display. Development and application of microdetection technology.

Based on the development of Taiwan's own technology and other considerations, the center is led by Dr. Lin Guangyi to develop and make ultrawide wavelength "multiphoton microscopy", which not only plays a role in the field of biomedicine, but also makes it possible to study emerging twodimensional semiconductor materials. It provides a new approach and application potential for the research and application of 2D materials and components (Nano Lett. 18, 793, 2018). The team's research and development work (in collaboration with Assistant Professor Chen Xiaoxiao of Sun YatSen University) was valued by TSMC and was cited in the Nature article published by Director Li Lianzhong this year (Nature 567, 169, 2019; Small 14, 1802351, 2018). 2D semiconductors are considered to be one of the best candidates for expanding Moore's Law. The European Commission has invested 1 billion euros in the Graphene Flagship, and semiconductor 2D materials are still in the ascendant.

Source: Ministry of Science and Technology, R.O.C